Miniature regulator for VMB´s or tools with small footprint requirements
Max. rated inlet pressure: 10 bar (150 PSIG)
Outlet pressure ranges: 20 in Hg - 1 bar, 0.1 - 2 bar, 0.2 - 4 bar, 0.2 - 7 bar
Flow capacity:
Vacuum: 10 slpm
Standard flow: 50 slpm
High flow: 120 slpm

Max. rated inlet pressure: 10 bar (150 PSIG)

Outlet pressure ranges: 20 in Hg - 1 bar, 0.1 - 2 bar, 0.2 - 4 bar, 0.2 - 7 bar

Flow capacity:

Vacuum: 10 slpm

Standard flow: 50 slpm

High flow: 120 slpm

Body material: 316L VAR stainless steel

Connections:

Surface mount: 1.125“ or 1.50“ footprint

Welded Fittings: 1/4“ VCR® or 1/4“ tube stubs

• Product of choice for state-of-the-art OEM gas systems
• Ultra-sensitive pressure control – enhances MFC performance
• Superior performance in a wide range of applications
• Flows from 2 Ncm3 to 120 Nl/min
• Unsurpassed droop and repeatability in a micro component
• Metal-to-metal seal at diaphragm/body interface
• 0.25 µm or 0.125 µm finishes on all wetted surfaces

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Economical cylinder regulator or point of use regulator for inert gases
Max. rated inlet pressure: 20 bar
Max. outlet pressure: 0 to 9 bar
Flow capacity: Diaphragm: Cv = 8.0 / Bellows: Cv = 20.0

Body material: 316L Stainless Steel

Connections:Tube extension

• Diaphragm sensing element maintains very accurate downstream pressure
• Ra 0.25 µm internal surface finishes with full internal electropolish
• 316L Stainless Steel bar stock construction
• Two loading options available: Spring/wrench-adjust and air-actuated
• Two sensing options available: Diaphragm and bellows (bellows sensing element expands flow capability beyond 2000 Nm3/h)
• Compatible with ER3000 Electronic Controller
• Featuring PureWeldTM for all tube sizes (Internal Diameter Welding)

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Point of use regulator for ultra high flow rates. (Cv=1,8)
Max. inlet pressure: 10 bar or 17.5
Outlet pressure ranges: 0-2 bar, 0-4 bar, 0-7 bar
Flow capacity: Cv = 1.8

Body material: 316L VAR stainless steel with Electropolish or 316L VAR stainless steel with Precision Electro-Polish (P.E.P.) Connections: Welded female or male VCR, Tube Stubs, High Purity Internal Connections

Smooth unobstructed flow path for short purging time Threadless construction (23-4 Series) Minimized particle generation because of springless & threadless construction (23-3 Series) Enhanced corrosion resistance with Precision Electro-Polishing (P.E.P.) available Excellent leak integrity is created by metal to metal diaphragm to body seal

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Economical cylinder regulator or point of use regulator for inert gases
Max. rated inlet pressure: 40, 240 bar
Outlet pressure ranges: 0 - 2 / 0 - 4 / 0 - 7 / 0 - 10 / 0 - 17 bar
Flow capacity: Cv = 0.06 / Cv = 0.15

Body: 316L SST with Electro-Polish or 316L SST with internal Electro-Polish

Diaphragm: 316L stainless steel, Hastelloy®

Valve seat: PCTFE, Teflon®, Vespel®

Spring: 316 stainless steel, Elgiloy®

Internal Surface Finish: Ra 0.13 or 0.25 µm

Connections: Welded female or male VCR®, Tube stubs, High Purity Internal Connections (H.P.I.C.) (Internal style of VCR®, compatible with male swivel VCR®)

• Ra 0.25 or Ra 0.13 µm internal surface
• Full internal Electro-Polish available
• True metal to metal body to diaphragm seal
• Positionable ported bonnet ring available
• Five outlet pressure ranges available

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Cylinder regulator or point of use regulator for corrosive gases
Max. inlet pressure: 70, 240 bar
Outlet pressure ranges: 0-2 bar, 0-4 bar, 0-7 bar, 0-10 bar
Flow capacity: Cv = 0.06, Cv = 0.15

Body material: Hastelloy®, 316L stainless steel with Electro-Polish or 316L stainless steel with internal Electro-Polish or 316L VAR stainless steel with internal Electro-Polish (Ra 0.25 µm or Ra 0.13 µm finish)

Connections: Welded female or male VCR, Tube Stubs, Compression, High Purity Internal Connections

• Positive shut-off seal minimizes creep
• Ra 0.13 µm and Ra 0.25 µm internal surface finishes
• Full internal Electro-Polish
• True metal to metal diaphragm to body seal
• Dome load option available < 1 x 10-9 mbar l/s He design inboard leak rate
• Hastelloy® trim optional

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Bulk HCl regulator or point of use regulator where a Positive Seal design is required
Max. rated inlet pressure: 10, 70, 103 bar
Outlet pressure ranges: 0 - 2 / 0 - 4 / 0 - 7 / 0 - 10 / 0 - 14 bar
Flow capacity: Cv = 1.2

Body: 316L SST with Electro-Polish or 316L SST with internal Electro-Polish

Diaphragm: Hastelloy®

Valve seat: PCTFE, Teflon® or Vespel®

Internal Surface Finish: Ra 0.25 µm

Connections: Welded female or male VCR®, Tube stubs, High Purity Internal Connections (H.P.I.C.) (Internal style of VCR®, compatible with male swivel VCR®)

• Tied diaphragm design
• Ra 0.25 µm internal surface finishes
• Electro-Polish or internal Electro-Polish
• Flow capacity: Cv = 1.2
• Hastelloy® trim available

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Dual stage cylinder regulator for very precise control over a wide range of inlet pressure
Max. rated inlet pressure: 240 bar
Outlet pressure ranges: 0 - 2 / 0 - 4 / 0 - 7 / 0 - 10 bar
Design proof pressure: 150% of max. rated pressure
Flow capacity: Cv = 0.06, Cv = 0.1

Body: 316L SST with Electro-Polish, 316L SST with internal Electro-Polish

Diaphragm: Hastelloy®, 316L stainless steel

Valve seat: PCTFE or Teflon PFA®

Internal Surface Finish: Ra 0.25 µm

Connections: Welded female or male VCR®, Tube stubs, High Purity Internal Connections (H.P.I.C.) (Internal style of VCR®, compatible with male swivel VCR®)

• Ra 0.25 µm internal surface finishes
• Full internal electropolish available
• True metal to metal body to diaphragm seal
• Choice of free poppet or tied diaphragm

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Cylinder regulator or point of use regulator with a larger diaphragm
Max. rated inlet pressure: 40, 240 bar
Outlet pressure ranges: 0 - 2 / 0 - 4 / 0 - 7 / 0 - 10 bar
Flow capacity: Cv = 0.06, Cv = 0.15

Body: 316L SST with Electro-Polish or 316L SST with internal Electro-Polish

Diaphragm: Hastelloy®

Valve seat: PCTFE, Teflon® or Vespel®

Internal Surface Finish: Ra 0.25 µm

Connections: Welded female or male VCR®, Tube stubs, High Purity Internal Connections (H.P.I.C.) (Internal style of VCR®, compatible with male swivel VCR®)

• Ra 0.25 µm internal surface finishes
• True metal to metal seal (body to diaphragm)
• Full internal electropolish available
• 0.1 micron particle certification available
• Designed to reduced pressure fluctuations in semiconductor gas systems
• Meets the stringent semiconductor requirements of both point of use and cylinder applications

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Absolut pressure regulator for low vapor pressure gases like WF6 or BCl3 (if required)
Max. rated inlet pressure: 8.3, 42, 240 bar
Outlet pressure ranges: 67 mbar abs. - 1 bar / 67 mbar abs. - 2 bar / 67 mbar abs. - 4 bar / 67 mbar abs. - 7 bar
Flow capacity: Cv = 0.06 / Cv = 0.15 / Cv = 0.24

Body: 316L SST with Electro-Polish or, 316L SST with internal Electro-Polish or 316L VAR SST with internal Electro-Polish

Diaphragm: 316L stainless steel, Hastelloy®

Valve seat: PCTFE, Teflon®

Valve spring: 316 stainless steel, Elgiloy®

Internal Surface Finish: Ra 0.13 µm or Ra 0.25 µm

Connections: Welded female or male VCR®, Tube stubs, High Purity Internal Connections (H.P.I.C.) (Internal style of VCR®, compatible with male swivel VCR®)

• Negative bias for controlling vacuum and low positive pressures
• Ra 0.13 or Ra 0.25 µm internal surface finishes
• True metal to metal diaphragm to body seal
• < 1 x 10-9 mbar l/s He design inboard leak rate
• Precision Electro-Polish (P.E.P.) available

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Maximum rated inlet pressure: 42 bar (600 PSIG)
Outlet pressure ranges: 0.2 - 2 / 0.2 - 4 / 0.3 - 7 / 0.3 - 10 bar
Flow capacity: Cv = 1.0

• Compact, hand loaded & pressure reducing
• Low internal volume
• Excellent leak integrity is created by metal to metal diaphragm to body seal

Body material: 316L SST with electropolish

Connections: Welded female or male VCR®, Tube stubs, Compression Fittings

• Compact, hand-loaded & pressure reducing
• Low internal volume
• Excellent leak integrity is created by metal to metal diaphragm to body seal

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Cylinder regulator or point of use regulator for ultra high purity applications
Maximum rated inlet pressure: 42 or 240 bar
Outlet pressure ranges: 0.1 - 2 / 0.1 - 4 or 0.1 - 7 bar
Flow capacity:
240 bar (3500 PSIG) model: Cv = 0.06
42 bar (600 PSIG) model: Cv = 0.1

Body material: 316L VAR stainless steel

Connections: Welded female or male VCR®, Tube stubs, High Purity Internal Connections (H.P.I.C.)(Internal style of VCR®, compatible with male swivel VCR®)

• Manufactured and tested using Total Quality tools including Statistical Process Control
• No internal springs and a low internal volume minimizes particle entrapment
• Metal to metal seal at diaphragm/body interface
• Ra 0.25 or Ra 0.13 µm finishes available with Tescom’s Precision Electro-Polish (P.E.P.) process for enhanced surface chemistry

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Cylinder regulator or point of use regulator for high flow rates (Cv=0,5)
Maximum rated inlet pressure: 21, 42, 70 or 240 bar
Outlet pressure ranges: 28" Hg Vac - 1 bar / 0.2-2 / 0.2-4 / 0.3-7 & 0.3-10 bar
Flow capacity: Cv = 0.5

Body material: 316L VAR SST with electropolish or 316L VAR SST with Precision Electro-Polish (P.E.P.)

Connections: Welded female or male VCR®, Tube stubs, High Purity Internal Connections (H.P.I.C.) (internal style of VCR®, compatible with male swivel VCR®)

• Compact, hand-loaded & pressure reducing
• Low internal volume
• Smooth unobstructed flow path for complete purging
• Tescom’s Precision Electro-Polish (P.E.P.) available
• Internally threadless
• Absolute pressure range model available
• Excellent leak integrity is created by metal to metal diaphragm to body seal

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Cylinder regulator or point of use regulator for high flow rates. (Cv=0,5)
Max. inlet pressure: 40, 70, 240 bar
Outlet pressure ranges: 0-2 bar, 0-4 bar, 0-7 bar, 0-10 bar
Flow capacity: Cv = 0.5

Body material: 316L VAR stainless steel with Electropolish or 316L VAR stainless steel with Precision Electro-Polish (P.E.P.) Connections: Welded female or male VCR, Tube Stubs, Compression, High Purity Internal Connections

Internal surface chemistry is enhanced by Tescom‘s Precision Electro-Polish (P.E.P.) process Internally springless & threadless design Excellent leak integrity is created by metal to metal diaphragm to body seal Smooth unobstructed flow path allows for complete purging Positive shut-off seal, tied diaphram design with positionalble captured vent bonnet Hastelloy C® trim option available

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Bulk HCl regulator for high flow applications.
Max. rated inlet pressure: 105 bar
Outlet pressure range: 1.7 - 28 bar
Flow capacity: Cv = 1.0

Body: 316L stainless steel

Diaphragm: Elgiloy®

Seat: PCTFE

Trim: Hastelloy®

Internal Surface Finish: Ra 0.25 µm

Connections: Welded female or male VCR®, Tube stubs

• Exclusively designed to handle the demands of high purity bulk specialty gas delivery systems
• Its proven design, high outlet capabilities, bubble-tight shut-off valve and standard Hastelloy® trim provides dependability needed for demanding regulator applications
• Metal to metal sealed diaphragm
• Cv = 1.0 with Ra 0.25 µm finish on wetted surfaces

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High flow point of use regulator 'dualender'
Inlet pressure: up to 500 PSI
Flow capacity: 2.8 Cv

Refer to datasheet (Downloads) for information

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Economical cylinder regulator or point of use regulator for inert gases
Max. rated inlet pressure: 69 or 240 bar
Outlet pressure ranges: 10 bar, 17 bar max.
Flow capacity: <9 Nm3/h at Cv=0,06

Gauges: Standard gauges, contact gauges,

Valve Unit: Untied, Positive seal

Options: Cv = 0.15 or Cv = 0.24 / Inlet filter / Pneumatic valve actuator / Vespel regulator seat / Pigtail with cylinder connector

• VCR®-technology for high purity application
• Automatic Changeover for continous gas supply
• Integrated purge and shut-off valve for fast purging
• Optional with Hastelloy® trim and positive seal for corrosive media
• Prooven 64 series regulator design

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